| Author | Calvin F. Quate , Stephen C. Minne , Scott R. Manalis |
| Format | Hardcover |
| ISBN | 9780792384663 |
| Publication Date | 17/05/2009 |
| Publisher | Springer |
| Manufacturer | Kluwer Academic Publishers Group |
Introduces the principles of scanning probe systems focusing on techniques for increasing speed. This book includes information on the characteristics and limitations of machines as well as the properties of the systems that follow in the future.
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