Handbook of Advanced Plasma Processing Techniques

Name: Handbook of Advanced Plasma Processing Techniques
Brand: Springer
SKU: 21740350
Price: 9205.00 ZAR
Availability: InStock

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Features

Author	R. J. Shul
Format	Hardcover
ISBN	9783540667728
Publisher	Springer
Manufacturer	Springer

Description

This volume covers the topic of advanced plasma processing techniques, from the fundamental physics of plasmas to diagnostics, modeling and applications such as etching and deposition for microelectronics. The use of plasmas for patterning on a submicron scale has enabled successive generations of continually smaller transistors, lasers, micromachines, sensors and magnetic read/write heads that have formed the basis of our information age.

This volume is the first to give coverage to this broad area of topics in a detailed fashion, especially in the rapidly expanding fields of micro-mechanical machines, photomask fabrication, magnetic data storage and reactor modeling. It provides the reader with a broad array of topics, authored by the leading experts in the field.

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