| Author | Hector de Los Santos |
| Format | Hardcover |
| ISBN | 9781402032387 |
| Publication Date | 12/11/2006 |
| Publisher | Springer |
| Manufacturer | Kluwer Academic Publishers Group |
Offering an exposition of the physical principles at the heart of NanoMEMS-based devices and applications, this book presents the fundamentals and limitations of nanotechnology and MEMS fabrication techniques. It addresses the physics operating on this scale, namely, quantum wave-particle phenomena, and quantum wave phenomena.
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