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Progress in SOI Structures and Devices Operating at Extreme Conditions NATO Science Series II: Mathematics, Physics and Chemistry



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Offers a review of the electrical properties, performance and physical mechanisms of the main silicon-on-insulator (SOI) materials and devices. This book focuses on the reliability of SOI structures operating in harsh conditions. It deals with material technology and describes th... Read more
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Features
Author Francis Balestra , Alexei N. Nazarov , Vladimir S. Lysenko
Format Hardcover
ISBN 9781402005756
Publication Date 10/08/2008
Publisher Springer
Manufacturer Kluwer Academic Publishers Group
Description

Offers a review of the electrical properties, performance and physical mechanisms of the main silicon-on-insulator (SOI) materials and devices. This book focuses on the reliability of SOI structures operating in harsh conditions. It deals with material technology and describes the SIMOX and ELTRAN technologies.


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