| Author | Nadim Maluf |
| Format | Hardcover |
| ISBN | 9780890065815 |
| Publisher | Artech Print On Demand |
| Manufacturer | Artech Print On Demand |
Provides a nontechnical introduction to the exciting field of micro-electromechanical systems (MEMS) that describe in detail the materials used in producing MEMS-including silicon, polymers, and glass and quartz substrates-as well as MEMS design and fabrication for nozzles, pressure and inertial sensors, valves, displays, and other applications. DLC: Microelectromechanical systems.
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