| Author | Chuan Seng Tan et. al. |
| Format | Hardcover |
| ISBN | 9780387765327 |
| Publication Date | 01/08/2008 |
| Publisher | Springer |
| Manufacturer | Springer-verlag New York Inc. |
This book focuses on foundry-based process technology that enables the fabrication of 3-D ICs. The core of the book discusses the technology platform for pre-packaging wafer lever 3-D ICs. However, this book does not include a detailed discussion of 3-D ICs design and 3-D packaging. This is an edited book based on chapters contributed by various experts in the field of wafer-level 3-D ICs process technology. They are from academia, research labs and industry.
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