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The Physics of Micro Nano-Fabrication Microdevices



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In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate thei... Read more
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Features
Author Ivor Brodie , Julius J. Muray
Format Hardcover
ISBN 9780306441462
Publisher Kluwer Academic / Plenum Publishers
Manufacturer Kluwer Academic / Plenum Publishers
Description

In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.


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