| Author | Hattori |
| Format | Hardcover |
| ISBN | 9783540616726 |
| Publication Date | 17/05/2009 |
| Publisher | Springer |
| Manufacturer | Springer-verlag Berlin And Heidelberg Gmbh & Co. K |
Summarizes the knowledge and experience of the successful Japanese semiconductor companies. This book also discloses the secrets of the processing of semiconductor surfaces for device production. It is useful for the people and companies involved in the manufacturing of silicon-based semiconductor devices.
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