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Scanning Probe Lithography Hardback

This work describes advances in the field of scanning probe lithography (SPL), a high resolution patterning technique that uses a sharp tip in close proximity to a sample to pattern nanometer-scale features on the sample. more details

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Features

Author	Calvin F. Quate , Hyongsok T. Soh , Kathryn Wilder Guarini
Format	Hardcover
ISBN	9780792373612
Publication Date	21/04/2007
Publisher	Kluwer Academic Publishers
Manufacturer	Kluwer Academic Publishers

Description

This work describes advances in the field of scanning probe lithography (SPL), a high resolution patterning technique that uses a sharp tip in close proximity to a sample to pattern nanometer-scale features on the sample.

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